E10900 - SEMI E109 - レチクルおよびポッド管理に関する仕様(RPMS) Revision:SEMI E109-0305 - Superseded this Standard has been written

this Standard has been written so that injection-molded plastic FOSBs can be manufactured in conformance with it

These EPDs are

provided that there are suitable structural etching procedures available

This Test Method can be used for silicon in which the impurity/dopant concentrations are between 0

本基準建議遵循傳統的風險管理層級來降低風險:去除、工程控制、行政管理、警告與工作實務等。適當的使用本基準可協助產出含有鑑別、分析與評估殘餘火災風險之報告。

E10900 - SEMI E109 - レチクルおよびポッド管理に関する仕様(RPMS) Revision:SEMI E109-0305 - Superseded this Standard has been writtenGlobal Information & Control CommitteeNorth American Information & Control Committee20041210North American Regional Standards Committee20052www. semi. org2005320017200411 ReticleID AMHS ID Subordinate Document: SEMI E109. 1 0704 PODRPMSSEC II Referenced SEMI Standards SEMI E5 SEMI Equipment Communications Standard 2 Message Content (SECS II) SEMI E15 Specification for Tool Load port SEMI E30 Generic Model for Communications and Control of SEMI