E11600 - SEMI E116 - 装置性能トラッキング（EPT）のための仕様 Revision:SEMI E116-0707E - Superseded The specified cast silicon wafer

The specified cast silicon wafer includes cast silicon category I wafer and cast silicon category II wafer

Tube fittings defined in this method are made of fluorocarbon materials for all parts in contact with the internal fluid

the industrial applications of these components require high mechanical strength

8 — Guide for High Purity and Ultrahigh Purity Gas Distribution Systems in Semiconductor Manufacturing Equipment

1が新たに作成されたことを反映して，0307の出版サイクルで更新された。

E11600 - SEMI E116 - 装置性能トラッキング（EPT）のための仕様 Revision:SEMI E116-0707E - Superseded The specified cast silicon waferNOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. SEMI SEMI E 20079R1 13 300 mmEPT EPTEPTEPTEPTMES: Manufacturing Execution SystemSEMI E10SEMI E79EPT (EPT: Equipment Performance Tracking) EPT SEMI E10SEMI E58 SEMI E58SEMI E58SEMI E10 SEMI E10SEMI E79SEMI E10SEMI E79EPTSEMI E10SEMI E79EPTSEMI