M03800 - SEMI M38 - Specification for Polished Reclaimed Silicon Wafers Revision:SEMI M38-0312 - Superseded Secondary ion mass spectrometry (SIMS)

Secondary ion mass spectrometry (SIMS) can measure on polished silicon wafer product the following:

SEMI M38-0307 (technical revision)

SEMI F48-0600 (Reapproved 1214)

1  This Specification defines the data items that are required to report

and two classes of larger diameter test wafers (from 150 mm)

M03800 - SEMI M38 - Specification for Polished Reclaimed Silicon Wafers Revision:SEMI M38-0312 - Superseded Secondary ion mass spectrometry (SIMS)This Specification divides reclaimed wafers into four application categories: Mechanical, Furnace, Particle, and Lithography and provides tables of the specification requirements for each category. Thus, a prospective purchaser of reclaimed silicon wafers needs to know which application matches his or her requirements. Only requirements for some attributes are specified in Tables 1 and 2. Other requirements are indicated to be customer specified which