M04000 - SEMI M40 - Guide for Measurement of Roughness of Planar Surfaces on Polished Wafers StdTpc-Flat Panel Display ) or specific instance of

) or specific instance of equipment

SEMI E133-0707 (technical revision)

NTPv4 protocol for time synchronization is specified in this Standard because it is applicable to systems communicating by local area networks supporting multicast messaging including but not limited to Ethernet

and optical interferometric measurement methods

and other methods of measuring electrostatic parameters

M04000 - SEMI M40 - Guide for Measurement of Roughness of Planar Surfaces on Polished Wafers StdTpc-Flat Panel Display ) or specific instance ofThis Guide incorporates the following methodologies: Standardized scan patterns for both local and full area surface characterization, A set of roughness abbreviations that describe measurement conditions in a short hand code, and Reference test methodologies for three generic types of roughness measuring instruments. These general categories may include, but are not limited to: Profilometers AFM and other scanning probe microscopes; optical