E03400 - SEMI E34 - Safety Guideline for Mass Flow Device Removal and Shipment StdTpc-Electronic Data Interchange SEMI E6 — Guide for

SEMI E6 — Guide for Equipment Semiconductor Installation Documentation

注意：　本文書は，編集上の修正を伴い，再承認された。

7-0304E (editorial revision)

Test Method 1 describes how to:

本試験方法は，global Compound Semiconductor Committeeで技術的に承認されている。現版は2005年11月29日，global Audits and Reviews Subcommitteeにて発行が承認された。2006年1月にwww

E03400 - SEMI E34 - Safety Guideline for Mass Flow Device Removal and Shipment StdTpc-Electronic Data Interchange SEMI E6 — Guide forNOTICE: This Standard or Safety Guideline has Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. This Safety Guideline provides procedures to reduce the risk associated with removing, shipping, and receiving mass flow devices that have been exposed to hazardous materials. This Safety Guideline is intended to: Encourage