E01000 - SEMI E10 - Specification for Definition and Measurement of Equipment Reliability, Availability, and Maintainability (RAM) and Utilization StdTpc-Process Chemicals - Bases SEMI D39-0704 (Reapproved 0117)

SEMI D39-0704 (Reapproved 0117)

SEMI E87-0707 (technical revision)

and behavior are not required to be compliant to this Specification

The values given in parentheses are for information only

- Common approaches for defining specific elements of equipment metadata

E01000 - SEMI E10 - Specification for Definition and Measurement of Equipment Reliability, Availability, and Maintainability (RAM) and Utilization StdTpc-Process Chemicals - Bases SEMI D39-0704 (Reapproved 0117)1 Purpose 1. 1 This Specification establishes a common basis for communication between users and suppliers of manufacturing equipment in the semiconductor and related industries by providing a standardized methodology for measuring reliability, availability, and maintainability (RAM) and utilization performance of equipment in a manufacturing environment. 2 Scope 2. 1 This Specification defines six mutually exclusive, basic equipment states for all of